TapTechNews October 8th news, the State Administration for Market Regulation today released the news that the General Administration of Market Regulation has newly approved three national first-class reference materials such as two-dimensional chromium nanogrid reference material, two-dimensional silicon nanogrid reference material, and one-dimensional silicon nanograting reference material. They can simultaneously meet the angle and length calibration requirements of the nanomanufacturing industry and provide an accurate "ruler" for nanomanufacturing in new-generation information technology, new materials, biological manufacturing, high-end equipment and other fields.
The Metrology Department of the State Administration for Market Regulation introduced that developing high-precision nanoscale reference materials is the key to building a high-accuracy nanoscale measurement transfer chain and improving the quality and reliability of domestic nanomanufacturing products.
Experts from Tongji University, the research and development unit of reference materials, said that the two-dimensional chromium nanogrid reference material breakthroughly adopts the stepwise deposition atomic lithography technology, which is more difficult to prepare and can be directly traced back to the quantization physical constant in nature (chromium atomic transition frequency). The absolute accuracy of the angle is at the order of 0.001° equivalent to dividing a cake into 360,000 equal parts in a sector.
The structural area of the two-dimensional chromium nanogrid is generally 300 μm × 300 μm. Under the condition of no scratch or damage, 2 μm × 2 μm is used each time, and the number of non-repeated use of the measurement area can reach more than 20,000 times. It can be applied to the calibration of integrated circuit micro-nano detection equipment such as wafer-level atomic force microscope and scanning electron microscope, and can also be applied to the grating interferometry calibration of various parameters of ultra-precision displacement sensors.
The State Administration for Market Regulation said that the successful development of nanoscale angle reference materials has realized the flattening metrology in the nanoscale measurement field and avoided the error accumulation and amplification caused by the traditional step-by-step value transfer method. It can directly transfer high-precision metrology data directly to the enterprise metrology site through online calibration providing strong support for the high-quality development of China's nanomanufacturing industry.
In the next step, the General Administration of Market Regulation will continue to strengthen the research and development and application of reference materials in the nanoscale measurement field and further solve the problems of "unable to measure, incomplete measurement, and inaccurate measurement" in nanomanufacturing.
TapTechNews learned from public information that the Metrology Department of the State Administration for Market Regulation undertakes the management of national metrology benchmarks, metrology standards, metrology reference materials and measuring instruments, organizes the work of value transfer and traceability and metrology comparison; undertakes the establishment and organization of the implementation of the national metrology technical specification system; undertakes the supervision and management of commodity quantity, market metering behavior, metrology arbitration verification and metrology technical institutions and personnel; and standardizes the use of metrology data.