TapTechNews August 25th news, from August 21st to 25th, the 2024 World Robot Conference was held in Beijing, and 169 enterprises exhibited more than 600 innovative products.
It is introduced that the vacuum manipulator is a key equipment responsible for wafer transfer between different workstations in the chip manufacturing process. In the cutting-edge process, the repeated positioning accuracy requirement reaches 0.008 inches (about 0.2 mm), which is equivalent to 1/5 of the diameter of a human hair. This equipment has long been monopolized by foreign enterprises and is a名副其实“bottleneck” technology.
Sinovac independently conquered the new-generation vacuum manipulator technology and achieved batch application in China's most advanced chip manufacturing factory.
The Sinovac Centaur vacuum manipulator has leading repeated positioning accuracy, collision protection, and AWC intelligent dynamic correction functions. The manipulator adopts a double-independent design, and the two arms perform pick-and-place work independently without affecting each other, and the transfer efficiency is greatly improved compared to that of traditional manipulators, and it can handle wafer handling of different sizes.
TapTechNews noticed that Sinovac also exhibited related robot products/systems such as the dual-arm embodied intelligent grasping station, industrial robot 3D vision teaching-free system, and special robots.