Canon to Launch New FPD Exposure Equipment in June 2024

TapTechNews May 28th news, Canon China officially announced that it will launch a new FPD exposure equipment product MPAsp-E1003H that supports the use of the 6th generation glass substrate in early June 2024.

TapTechNews note: FPD is Flat Panel Display. The common products that everyone sees can generally be divided into different types such as LCD, OLED, LED, PDP, ELD, FED, and projection display.

Canon said that this product adopts a projection optical system, which can achieve a high resolution of 1.5 μm (L/S), and the one-time exposure range is expanded by about 1.2 times, so that the production capacity will be further improved.

According to the introduction, this projection optical system was once used in MPAsp-H1003H, which can be used to produce 65-inch panels for large TVs and the like by one-time exposure using the 8th generation glass substrate.

On a glass substrate, if products such as smartphone panels are produced, 6-shot exposures are required before, but the new product only needs 4-shot exposures, and the production performance is greatly improved. In addition, when producing a large special horizontal display for vehicles, seamless 2-shot exposures can also be achieved. Moreover, the driving speed of the glass substrate mounting table is increased by about 60%, and the tact time is increased by about 14%, effectively improving the mass production efficiency.

Canon said that in addition to adopting the same multi-point simultaneous measurement alignment method for each panel as the MPAsp-E813H that supports the 6th generation glass substrate (which not only ensures production efficiency but also achieves high-precision exposure), the new product also carries a newly developed non-linear correction REI (Real-Time Equalizing distorted Image) module, so that even if the exposure range is expanded, it can achieve ±0.30 μm high overlay accuracy.

In addition, the new product continues the illumination mode switching mechanism that once achieved super-resolution technology carried on MPAsp-H1003H, which can switch the illumination mode according to the type of exposure pattern required, so as to adapt to the exposure of various manufacturing processes.

In this new product, in the mechanism that forms an arc light, an exposure slit automatic adjustment mechanism (SIC: Slit Illuminance Control) is equipped. By automatically controlling the width of the slit through which the light passes, the intensity distribution of the exposed light can be changed, thereby achieving a stable exposure line width.

At the same time, the new product also adopts a universe chuck that can freely select the longitu dinal and transverse directions of the glass substrate according to the exposure layout, and realizes the ability to deal with the diversified layout requirements of vehicle-mounted displays for the first time. Canon said that MPAsp-E1003H makes the manufacturing quality more stable by strengthening the process response ability of the above manufacturing processes.