South Korean Company Jusung Engineering Develops New ALD Technology for Semiconductor

TapTechNews July 16th news, according to the report of the South Korean media TheElec, the South Korean semiconductor company Jusung Engineering has newly developed Atomic Layer Deposition (ALD) technology, which can reduce the demand for Extreme Ultraviolet Lithography (EUV) process steps in the production of advanced process chips.

TapTechNews note: Extreme Ultraviolet Lithography (EUV), also known as Extreme Ultraviolet Lithography, is a lithography technology using the wavelength of extreme ultraviolet light. It is currently used in advanced processes below 7 nanometers and has been widely used since 2020.

Chairman of Jusung Engineering, Chul Joo Hwang, said that the expansion of current DRAM and logic chips has reached the limit, so it is necessary to overcome this problem by stacking transistors like NAND.

If the semiconductor industry wants to shrink transistors to a smaller size, one solution is to stack transistors, and one evidence is that Deep Ultraviolet (DUV) equipment is expected to be used in the production of 3D DRAM.

Hwang said that as stacking becomes more and more important, the demand for ALD machines will also increase. The production of III-V and IGZO semiconductors also requires ALD equipment.