TSMC to Receive Over 60 EUV Lithography Machines in 2024-2025

TapTechNews July 1st news, according to Taiwan media 'Commercial Times' report, TSMC will receive over 60 EUV lithography machines from 2024 to 2025, and its investment in EUV lithography machines in this year and next will exceed 400 billion New Taiwan Dollars (TapTechNews note: currently about 89.661 billion RMB).

The report states that the supply of ASML's EUV lithography machines is currently tight, and the overall cycle from order placement to delivery has reached 16 to 20 months.

TSMC will place orders for about 30 and 35 EUV lithography machines in this year and next, and most of these orders will be delivered starting from 2026.

The Taiwan media cited supply chain sources as saying that ASML's planning for 2025 capacity is 20 High-NA EUV lithography machines, 90 EUV lithography machines, and 600 DUV lithography machines.

According to TSMC's official road map, its currently planned most advanced process 16A will be mass-produced in 2026 and still uses the traditional 0.33NA EUV lithography machine. In other words, TSMC has not temporarily considered introducing High-NA in the mass production process.

Although ASML has confirmed that it will deliver High-NA EUV lithography machines to TSMC within 2024, this machine is only for process development purposes.

The Taiwan media also said that TSMC has no plan to introduce High-NA EUV lithography machines for mass production use from 2025 to 2026.