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#KrF lithography machine#
China's Ministry of Industry and Information Technology Issued the Guiding Catalogue for the First Set of Major Technical Equipment, Including Domestic KrF and ArF Lithography Machines
The article reports on the Ministry of Industry and Information Technology's notice including domestic lithography machines and their technical details, with implications for China's industrial independence.
Maxwell
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KrF lithography machine
ArF lithography machine
China
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